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Stages
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Motorized |
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Manual Stages |
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AA- Motorized 3-Axis
(X-Y-O) Alignment Stage
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Micro Motion
Technology Co., Ltd.(MMT) is the leading manufacturer and distributor
of high precision positioning tables and precision components used for
development and application of the advanced research and industrial
applications. This low profile X-Y-Theta stage is suited for alignment of semiconductor wafer and other products.
| Features
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- Fine
X-Y-T 3-axis alignment stage for inspection system (Hollow hole
is optional)
- Travel
range : ± 10 mm / ± 10 mm / ± 15°
- High
stiffness cross roller guide stage
- 3-axis
are on the same plane
- Vacuum
environment compatible is optional
- Applications
: Precision processing and inspection systems of Semiconductor,
LCD, FPD, PCB, etc
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| Specifications |
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Table Size(mm) |
300
X 300
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| Travel
Range(mm) |
±
10 / ±10 / ±15°
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| Uni-directional
Repeatability |
±
2μm
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| Bi-directional
Repeatability |
±
4μm
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| Accuracy(μm)
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±
3
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| Straightness(μm)
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±
5
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| Flatness(μm)
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±
10
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| Load
Capacity(kg) |
50
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| Weight(kg)
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20
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